JPH0642174Y2 - 変位変換装置 - Google Patents
変位変換装置Info
- Publication number
- JPH0642174Y2 JPH0642174Y2 JP4072189U JP4072189U JPH0642174Y2 JP H0642174 Y2 JPH0642174 Y2 JP H0642174Y2 JP 4072189 U JP4072189 U JP 4072189U JP 4072189 U JP4072189 U JP 4072189U JP H0642174 Y2 JPH0642174 Y2 JP H0642174Y2
- Authority
- JP
- Japan
- Prior art keywords
- pattern unit
- coil
- conversion device
- detection coil
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 20
- 238000001514 detection method Methods 0.000 claims description 23
- 230000004907 flux Effects 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4072189U JPH0642174Y2 (ja) | 1989-04-06 | 1989-04-06 | 変位変換装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4072189U JPH0642174Y2 (ja) | 1989-04-06 | 1989-04-06 | 変位変換装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02131615U JPH02131615U (en]) | 1990-11-01 |
JPH0642174Y2 true JPH0642174Y2 (ja) | 1994-11-02 |
Family
ID=31550752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4072189U Expired - Lifetime JPH0642174Y2 (ja) | 1989-04-06 | 1989-04-06 | 変位変換装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0642174Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012018157A (ja) * | 2010-06-10 | 2012-01-26 | Panasonic Electric Works Co Ltd | ポジションセンサ |
-
1989
- 1989-04-06 JP JP4072189U patent/JPH0642174Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02131615U (en]) | 1990-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5434504A (en) | Position sensors for linear motors including plural symmetrical fluxes generated by a planar drive coil and received by planar sense coils being colinear along an axis of motion | |
JPH0769130B2 (ja) | 磁気的変位センサ | |
JPS5845168B2 (ja) | 計器用変成器 | |
JP3559225B2 (ja) | 誘電型位置検出装置 | |
KR100769026B1 (ko) | 방위계 및 방위의 측정 방법 | |
US5066911A (en) | Apparatus and method for sensing displacement using variations magnetic flux linkage | |
JP3487452B2 (ja) | 磁気検出装置 | |
JPH0642174Y2 (ja) | 変位変換装置 | |
JP3212801B2 (ja) | リニアモータ | |
JPS63198876A (ja) | 電流検出器 | |
JPH04282481A (ja) | 磁電変換器 | |
JPH02278119A (ja) | 電磁誘導式変位センサ | |
JPH0395415A (ja) | 角度検出装置 | |
JP2800821B2 (ja) | リニアモータ | |
JPH0894728A (ja) | 磁界センサーと磁界センサーの製造方法 | |
JPH0392782A (ja) | 磁界センサ | |
JP2546169B2 (ja) | インダクトシンセンサ | |
JP2005024282A (ja) | 磁気式エンコーダ | |
JPH0868661A (ja) | 位置検出装置 | |
JP2514346B2 (ja) | 電流検出器 | |
JPS61201128A (ja) | トルク検出装置 | |
JPH0626808Y2 (ja) | 変位変換装置 | |
JPS6240455Y2 (en]) | ||
JPH0648433Y2 (ja) | 測定器の磁電変換素子付倹出装置 | |
JP2002267493A (ja) | 磁気式エンコーダ |